Page 883 - Mechanical Engineers' Handbook (Volume 2)

874 Introduction to Microelectromechanical Systems (MEMS): Design and Application

ence proceedings, and books as well as being available from the World Wide Web. In the
past several years many books on MEMS have been published:
1995: Integrated Optics, Microstructures and Sensors, M. Tabib-Azar (ed.), Kluwer Academic.
1996: Micromachines (A New Era in Mechanical Engineering), I. Fujimasa, Oxford University Press.
1997: Micromechanics and MEMS (Classical and Seminal Papers to 1990), W. S. Trimmer (ed.), IEEE
Press, New York.
1997: Fundamentals of Microfabrication, M. Madou, CRC Press, Boca Raton, FL.
1997: Handbook of Microlothography, Micromachining and Microfabrication, Vol. 2: Micromachining
and Microfabrication, P. Rai-Choudhury (ed.), SPIE Press.
1998: Micromachined Transducers Sourcebook, G. T. A. Kovacs, WCB McGraw-Hill, New York.
1998: Microactuators, M. Tabib-Azar, Kluwer Academic.
1998: Modern Inertial Technology, 2nd ed., A. Lawrence, Springer.
1998: Methodology for Modeling and Simulation of Microsystems, B. F. Romanowicz, Kluwer Academic.
1999: Selected Papers on Optical MEMS, V. M. Bright and B. J. Thompson (eds.), SPIE Milestone
Series, Vol. MS 153, SPIE Press.
1999: Microsystem Technology in Chemistry and Life Sciences, A. Manz and H. Becker (eds.), Springer.
2000: An Introduction to Microelectromechanical Systems Engineering, N. Maluf, Artech House.
2000: MEMS and MOEMS Technology and Applications, Vol PM85, P. Rai-Choudhury (ed.), SPIE Press.
2000: Electromechanical Systems, Electric Machines and Applied Mechatronics, S. E. Lyshevski, CRC
Press, Boca Raton, FL.
2000: Handbook of Micro/nano Tribology, 2nd ed., B. Bhushan, CRC Press, Boca Raton, FL.
2001: MEMS Handbook, Mohamed Gad-El-Hak (Editor in Chief), CRC Press, Boca Raton, FL.
2001: Microsystem Design, S. D. Senturia, Kluwer Academic.
2001: MEMS and Microsystems: Design and Manufacture, T.-R. Hsu, McGraw-Hill College Division,
New York.
2001: Mechanical Microsensors, M. Elwenspoek and R. Wiegerink, Springer.
2001: Nano- and Microelectromechanical Systems, S. E. Lyshevski, CRC Press, Boca Raton, FL.
2001: Microflows: Fundamentals and Simulations, 2nd ed., G. E. Karniadakis and A. Berskok, Springer
Verlag.
2001: Microsensors, MEMS and Smart Devices, J. W. Gardner, V. K. Varadan, and O. O. Awadelkarim,
Wiley, New York.
2001: Microstereolithography and Other Fabrication Techniques for 3D MEMS, V. K. Varadan, X. Jiang,
and V. V. Varadan, Wiley, New York.
2002: Fundamentals of Microfabrication (The Science of Miniaturization), 2nd ed., M. Madou, CRC
Press, Boca Raton, FL.
2002: MEMS and NEMS: Systems, Devices and Structures, S. E. Lyshevsky, CRC Press, Boca Raton,
FL.
2002: Microfluidic Technology and Applications, M. Koch, A. Evans, and A. Brunnschweiler, Research
Studies Press.
2002: Fundamentals and Applications of Microfluidics, N.-T. Nguyen and S. T. Wereley, Artech House.
2002: Microelectrofluidic Systems Modeling and Simulation, T. Zhang, K. Chakrabarty, R. B. Fair, and
S. E. Lyshevsky, CRC Press, Boca Raton, FL.
2002: Modeling MEMS and NEMS, J. A. Pelesko and D. H. Bernstein, CRC Press, Boca Raton, FL.
2002: Nanoelectromechanics in Engineering and Biology, M. P. Hughes, CRC Press, Boca Raton, FL.
2002: Optical Microscanners and Microspectrometers Using Thermal Bimorph Acutators, G. Lammel,
S. Schweizer, and P. Renaud, Kluwer.
2003: RF MEMS Theory, Design and Technology, G. M. Rebeiz, Wiley-Interscience, New York.
2003: MEMS and Their Applications, V. K. Varadan, K. J. Vinoy, and K. A. Jose, Wiley, New York.

REFERENCES

1. M. Madou, Fundamental of Microfabrication, CRC, Boca Raton, FL, 1779.
2. M. Madou, Fundamental of Microfabrication, The Science of Miniaturization, CRC Press, Boca
Raton, FL, 2002.