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04_chap_Wang.qxd  05/05/2004  1:15 pm  Page 164
                    164                                     Chung-Shin J. Yuan and Thomas T. Shen

                       In the case of ion bombardment, combining Eqs. (19)–(21) gives

                                                     t      
                               q = 4π K Pa E                
                                           2
                                             0
                                f
                                       0
                                                t + 4 K q m N 
                                                     0
                                                        i
                                                          i
                                                            0
                                  =4π (8.85 ×10 −12 )( )(  −12  )(10 6 )
                                                  310
                                                            0.1                     
                                      ×                                             
                                        0.1+  ( 4 8.85  ×10 −12  ) (1 602  ×10 −19  )(4  ×10 −4 )(10 14 ) 
                                                            .
                                  = 3.162  ×10 −16  ( C or 1,974 electronic charges )
                       Note that q  for this particular case happens to be 2082 electronic charges. Thus, in 0.1
                                max
                       s, the particle has already acquired 95% of its maximum charge.
                       For the case of diffusion charging, Eq. (26) provides the answer:
                                         π
                                           ( 85.
                                        48      × 10 −12 )(10 −6 )(1 38.  × 10 −23 )(313 )
                                   q =
                                    d
                                                    1 602  × 10 −19
                                                      .
                                             (  10 −8 )(10 14 )(2 566.  × 10 −38 )(500 )(0 1.  )  
                                          × ln                                +  1
                                               ( 48 85.  × 10 −12  )(1 38.  × 10 −23 )(313 )   
                                      = 2.02  × 10 −17 C (or 126 electronic charges )
                       Comparing the charges from two mechanisms illustrates the significance of field charging
                       as opposed to diffusion charging for a particle of 1 mm radius. Diffusion charging con-
                       tributes less than 6% of the total charge.
                       Repeating the above calculations for a particle of 0.1 µm radius and charging time of 0.1
                       s gives field charging of 20 electronic charges and diffusion charging of 8 electronic
                       charges. Being a contributor of almost 30% of the total charge, it obviously shows that the
                       diffusion-charging mechanism cannot be neglected for smaller particles.
                       Previously, we made use of particle space charge density σ without actually defin-
                                                                           p
                    ing it; see Eqs. (9), (11), and (15). We are now in a position to do so. Assuming that field
                    charging is the more dominant charging mechanism, Eq. (19) gives the maximum
                    charge acquired by a particle:
                                                                 2
                                                  q max  =πK 0 Pa E
                                                         4
                    Assuming that the particle concentration is N per unit volume, the total charge acquired
                                                           p
                    by all particles (i.e., particle space-charge density) is
                                                               2
                                                  σ = 4πΚ  0 Pa EN p
                                                   p
                    which may be also be expressed as

                                                    σ = K   0 PES                             (27)
                                                      p
                    where S is the total particle surface per unit volume of gas,

                                                     S = 4πa 2 N p
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