Page 117 - Inorganic Mass Spectrometry - Fundamentals and Applications
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Inductively  Coupled  Plasma  Mass  Spectrometry              l07

         particularly  the  addition  of  5% or less N, to the  plasma,  can  also  reduce  the
                                                                 of a
         molecular  ion  signals. A combination of reduced  water  loading  and  use mixed
         gas plasma  can  be  particularly  effective [ 1431. The addition of  CH,,  CHF,,  and
         C,H,  has  also  been  reported  to  reduce  the ArCl+, Ar2+, ArO+, ClO+, and MO+ ion
         signals  dramatically [ 144,1451.
              Cool or Cold  Plasma.   COO^^^ or “cold” plasma  conditions  can be used to
         reduce  the  magnitude of the Ar containing  molecular  ions  whereas  the  sensitivities
         for many  elements  with  ionization  potentials less than  6  eV  are  not  significantly
         affected [ 10,1461.  By  using  low  powers  (600 W) and  high  nebulizer  gas  flow  rates
         (1.0 L/min or greater)  signals  due to several  ions  that  are  dominant  under  normal
         plasma  conditions  (Fig.  3.1%) can  be  reduced. The Ar+ signal can be reduced by
         six  orders of magnitude  or  more,  ArH+ can be reduced by four orders of magni-
         tude,  and  ArO+ can be reduced by three  orders of magnitude  or  more [ 1471.  As a
         result,  detection  limits for K,  Ca, and  Fe  can  be  dramatically  improved.  The
         signals  from  other ions, including H30+, NO+, and 02+, increase dramatically,  to
                                                as shown  in  Fig.  3.15b. To attain
         become  the  dominant  ions  in  the  mass  spectrum,
          “cold” plasma  conditions  that  are  analytically  useful,  the  plasma  potential  must
         be  low  enough to prevent  discharge  formation.  This  can done either by using  an
                                                     be
         instrument  with a balanced  or  interlaced  load coil or by using a grounded  electrical
         shield  between  the  load coil and the torch to reduce capacitive rf coupling.
              Use of  “cold” plasma  conditions  is not  recommended  for elements  with
         high  ionization  potentials,  elements  that  form  refractive  oxides,  or  samples  with
         total dissolved  solid  concentrations  greater  than  about 50 ppm,  Sensitivities for
         elements  with  ionization  potentials  between  6  and
                                                  8 eV  are  up to 100  times  lower
         under “cold” plasma  conditions  than  under  normal  plasma  conditions,  and  ele-
         ments  with  ionization  energies  greater  than   8 eV  exhibit  sensitivities  that  are
          several  orders  of  magnitude  lower  under   “cold”  plasma  conditions.  Analyte
         oxides  are  much  more  readily  formed  under   “cold”  plasma  conditions.  For
         example,  the  formation of scandium  oxide  results in a Sc+ ion  signal  that is several
         orders of  magnitude  lower  under  “cold” plasma  conditions  than  under  normal
         conditions [ 1471, In  some  cases it is possible  to  attain  better  detection limits for the
          analyte  oxide  ion,  MO+, than  by  measuring  the  elemental  analyte  ion, M+. Finally,
                                            ICP, and  are  therefore  similar for light
         chemical  matrix  effects  that  originate  in  the
          and  heavy  mass  analytes,  are severe under “cold” plasma  conditions.  Changes  in
         the  extent of ionization  due to the  addition of efficiently  ionized  elements  occur
         because  the  plasma  temperature  and  electron  number  density much  lower  than
                                                          are
          under  normal  plasma  conditions.  Under “cold” conditions  the  addition of large
          concentrations of efficiently  ionized  elements  affects the electron number  density
          in  the  plasma  and  results  in  significant  decreases  in  the  number of  analyte  ions
          produced.  As a result, “cold” plasma  conditions  are  useful  mainly for very  clean
          smples, such as acids  used  in  the  semiconductor  industry.
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