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microtechnology and mems

Series Editor: H. Fujita D. Liepmann
The series Microtechnology and MEMS comprises text books, monographs, and
state-of-the-art reports in the very active field of microsystems and microtech-
nology. Written by leading physicists and engineers, the books describe the basic
science,devicedesign,andapplications.Theywillappealtoresearchers,engineers,
and advanced students.

Mechanical Microsensors
By M. Elwenspoek and R. Wiegerink
CMOS Cantilever Sensor Systems
Atomic Force Microscopy and Gas Sensing Applications
By D. Lange, O. Brand, and H. Baltes
Micromachines as Tools for Nanotechnology
Editor: H. Fujita
Modelling of Microfabrication Systems
By R. Nassar and W. Dai
Laser Diode Microsystems
By H. Zappe
Silicon Microchannel Heat Sinks
Theories and Phenomena
By L. Zhang, K.E. Goodson, and T.W. Kenny
Shap
e Memory Microactuators
By M. Kohl

Force Sensors for Microelectronic Packaging

By J. Schwizer, M. Mayer and O. Brand

Integrated Chemical Microsensor Systems in CMOS Techno---logy

By A. Hierlem

CCD Image Sensors in Deep Ultraviolet

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Degradation Behavior and Damage Mechanisms

By F. M. Li and A. Nathan

Micromechanical Photonics
By H. Ukita