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Basic Micr ofluidic and Soft Lithographic Techniques    9



           Property    Characteristics         Consequence
           Optical     Transparent; UV cutoff,   Optical detection from
                       240 nm                  240–1100 nm
           Electrical  Insulating; breakdown   Allows embedded circuits;
                                   7
                       voltage, 2 × 10  V/m    intentional breakdown to open
                                               connections
           Mechanical  Elastomeric; tunable    Conforms to surfaces; allows
                       Young’s modulus, typical   actuation by reversible
                       value of ~750 kPa       deformation; facilitates release
                                               from molds
           Thermal     Insulating; thermal     Can be used to insulate heated
                       conductivity, 0.2 W/(m · K);   solutions; does not allow
                       coefficient of thermal   dissipation of resistive heating
                       expansion, 310 μm/      from electrophoretic separation
                       (m · °C); stable up to
                       ~300°C
           Interfacial  Low surface free energy  Replicas release easily from
                       ~ 20 erg/cm 2           molds; can be reversibly sealed
                                               to materials; not wetted by
                                               water unless oxidized to Si-OH
                                               presenting surface
           Permeability  Low permeability to liquid   Contains aqueous solutions in
                       water; permeable to gases   channels; allows gas transport
                       and nonpolar organic    through the bulk material;
                       solvents                incompatible with many organic
                                               solvents
           Reactivity  Inert; can be oxidized by   Unreactive toward most
                       exposure to a plasma    reagents; surface can be
                                               etched; can be modified to be
                                               hydrophilic and also reactive
                                               toward silanes
           Toxicity    Nontoxic                Can be implanted in vivo;
                                               supports mammalian cell growth

          (Adapted from J. C. McDonald and G. M. Whitesides, “Poly(dimethylsiloxane) as a mate-
           rial for fabricating microfluidic devices,” Acc. Chem. Res., 35, (2002), 491–499.)

          TABLE 2-1  Physical and Chemical Properties of PDMS
               releases from features of a mold—including undercut features—without
               damaging them or itself. Microfluidic channels and other features on
               the micron scale can therefore be reproduced with high fidelity in
               PDMS by replica molding. Using composite stamps composed of two
               layers—a stiff layer supported by a flexible layer of PDMS, replica-
               tion of features below 1 nm has been demonstrated [20,21]. Because
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