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Bar-Cohen : Biomimetics: Biologically Inspired Technologies DK3163_c011 Final Proof page 300 22.9.2005 1:00am
300 Biomimetics: Biologically Inspired Technologies
Microdispensed Prepatterned SU-8
(i)
SU-8 monomer ring spatial
confinement
(ii) (vi)
(iii)
Lens assisted radial UV exposure
(iv)
(v) (vii)
Flexible PDMS elastomer UV mask
Photoresist
SU-8 Teflon@ like polymer
PDMS elastomer Substrate
(b)
Figure 11.10 (See color insert following page 302) (Continued )