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Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 1 1.9.2005 11:41am








                         1     Overview of

                               Microelectromechanical


                               Systems and


                               Microstructures in


                               Aerospace Applications



                               Robert Osiander and M. Ann Garrison Darrin



                    CONTENTS


                    1.1  Introduction...................................................................................................... 1
                    1.2  Implications of MEMS and Microsystems in Aerospace............................... 2
                    1.3  MEMS in Space............................................................................................... 4
                        1.3.1 Digital Micro-Propulsion Program STS-93 ......................................... 4
                        1.3.2 Picosatellite Mission............................................................................. 5
                        1.3.3 Scorpius Sub-Orbital Demonstration ................................................... 5
                        1.3.4 MEPSI................................................................................................... 5
                        1.3.5 Missiles and Munitions — Inertial Measurement Units...................... 6
                        1.3.6 OPAL, SAPPHIRE, and Emerald ........................................................ 6
                        1.3.7 International Examples......................................................................... 6
                    1.4  Microelectromechanical Systems and Microstructures
                        in Aerospace Applications............................................................................... 6
                        1.4.1 An Understanding of MEMS and the MEMS Vision ......................... 7
                        1.4.2 MEMS in Space Systems and Instrumentation.................................... 8
                        1.4.3 MEMS in Satellite Subsystems............................................................ 9
                        1.4.4 Technical Insertion of MEMS in Aerospace Applications................ 10
                    1.5  Conclusion ..................................................................................................... 11
                    References............................................................................................................... 12

                      The machine does not isolate man from the great problems of nature but plunges him
                      more deeply into them.
                        Saint-Exupe ´ry, Wind, Sand, and Stars, 1939

                    1.1 INTRODUCTION

                    To piece together a book on microelectromechanical systems (MEMS) and micro-
                    structures for aerospace applications is perhaps foolhardy as we are still in the

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