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Table of Contents

Preface .......................................................................................................................................v

Editor-in-Chief ......................................................................................................................vii

Contributors ............................................................................................................................ix

1 Introduction Mohamed Gad-el-Hak ........................................................................1-1

2 Materials for Microelectromechanical Systems Christian A. Zorman and
Mehran Mehregany ....................................................................................................2-1

3 MEMS Fabrication Guangyao Jia
and Marc J. Madou ......................................................................................................3-1

4 LIGA and Micromolding Guangyao Jia
and Marc J. Madou ......................................................................................................4-1

5 X-Ray–Based Fabrication Todd Christenson............................................................5-1

6 EFAB™ Technology and Applications Ezekiel J. J. Kruglick, Adam L. Cohen
and Christopher A. Bang ..............................................................................................6-1

7 Single-Crystal Silicon Carbide MEMS: Fabrication,
Characterization, and Reliability Robert S. Okojie ..................................................7-1

8 Deep Reactive Ion Etching for Bulk Micromachining
of Silicon Carbide Glenn M. Beheim and Laura J. Evans ......................................8-1

9 Polymer Microsystems: Materials and Fabrication Gary M. Atkinson
and Zoubeida Ounaies .................................................................................................9-1

10 Optical Diagnostics to Investigate the Entrance Length
in Microchannels Sang-Youp Lee,
Jaesung Jang and Steven T. Wereley ............................................................................10-1

11 Microfabricated Chemical Sensors for Aerospace Applications
Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu and Darby B. Makel ................11-1

12 Packaging of Harsh Environment MEMS Devices Liang-Yu Chen
and Jih-Fen Lei ..........................................................................................................12-1

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© 2006 by Taylor & Francis Group, LLC