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Or ganic Thin-Film Transistors for Inor ganic Substance Monitoring   83

               2.4.4  Gas Sensing Results and Perspectives of the Study
               Annealed Au-NP layers were used as active material in capacitive
               FET sensing devices consisting of p-doped Si semiconductor with a
               thermally grown SiO  insulating layer. The ohmic backside contact
                                  2
               consisted of evaporated, annealed Al. Bonding pads of evaporated
               Cr/Au were then deposited on the insulator. The sensor chip, a
               ceramic heater, and a Pt-100 element for temperature control were
               mounted on a 16-pin holder and then bonded.
                   A fixed volume (0.5 μL) of the colloidal gold solution was drop-
               cast on the SiO surface of the capacitor, partially overlapping the
                             2
               bonding pad and subjected to the thermal heating, prior to gas sens-
               ing measurements.
                   The first set of experiments aimed to investigate the effects of the
               operating temperature on the sensing performance. Measurements
               were performed at 150 and 175°C under a N /O  (90 to 10%) carrier
                                                     2  2
               gas flow. Typical calibration curves of FET capacitive sensors are
               reported in Fig. 2.13; note that a couple of preliminary injections
               (200 ppm of NO ) were used to condition the sensor, and then two
                              2

                           –0.95
                           –1.00
                           –1.05
                           –1.10
                         Voltage (V)   –1.15    200  50  50  100  100
                           –1.20
                           –1.25
                           –1.30      200  200  200
                           –1.35
                           –1.40   200               @150°C
                           –1.45
                           –0.05
                           –0.10
                           –0.15
                         Voltage (V)   –0.20        50  50    100
                           –0.25
                           –0.30
                                      200  200  200  200   100
                           –0.35
                           –0.40
                                   200               @175°C
                           –0.45
                                      3      6      9     12
                                              Time (h)

               FIGURE 2.13  Response curves of a sensor based on TOAC-stabilized Au-NPs
               and exposed to NO  in a nitrogen/oxygen carrier fl ow at 150 and 175°C.
                              2
               (Reprinted with permission from Ref. 175: E. Ieva, K. Buchholt, L. Colaianni, N.
               Cioffi , L. Sabbatini, G. C. Capitani, A. Lloyd Spetz, P. O. Käll, and L. Torsi, Sensor
               Letters, 6:577–584, 2008.)
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