Page 164 - Principles and Applications of NanoMEMS Physics
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152                                                      Chapter 4








                                              (a)

                   I I                       I I
                   SL                         SL
                   SL
                                              SL
                          (1) I
                          (1) I (V)                    (2) I SL
                             SL  (V)
                                                       (2) I (t) (t)
                             SL
                                                          SL
                                                                    t t
                      1   2   3    4    5    6     7    8   9     10  11
                      1   2   3    4    5    6     7    8   9     10  11
                                        V V       1       2     3       4    4        3     2      1
                                                  1       2     3       4    4        3     2      1
                                         SL
                                         SL
                                              dI /dt   (3)
                                                SL /dt
                                              dI
                                                       (3)
                                                SL
                             (4) V (t) (t)
                             (4) V SL                               t t
                                SL
                                                  1       2     3       4    4        3     2      1
                                                  1       2     3       4    4        3     2      1
                    1    2    3     4    4       3     2      1
                    1    2    3     4    4       3     2      1
                      t t
                                              (b)
                                  Differentiating Differentiating  Device  Device  Integrating Integrating  Device  Device
                          Input
                          Input
                     V V in in  Device                  N-bit    Digital
                         Device
                                                                 Digital
                                                        N-bit
                                                                 Output
                                                        Latch
                                                                 Code
                                                                 Code
                                         Dτ       Counting Counting  Device  Device  Latch  . . . . . .  Output
                                         Dτ
                             Switching
                             Switching
                              Device
                              Device
                                         + +
                                         - -
                                             (c)
             Figure 4-2. Superlattice-based analog-to-digital converter architecture. (a) Superlattice band
             diagram. (b) SL A/D conversion principle. (c) ADC architecture [175].
             4.2.2.2  Emerging Signal Processing Building Blocks
                While the specific structure of a NanoMEMS SoC is still the subject of
             much research, a number of potential building blocks for NanoMEMS-based
             signal processing have been proposed. In what follows, we present a number
             of these [22], namely, a charge detector, a which-path  electron
             interferometer,  a parametric amplifier using a torsional MEM resonator, a
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