Page 5 - Semiconductor For Micro- and Nanotechnology An Introduction For Engineers

Authors:
Prof. Dr. Jan G. Korvink Dr. Andreas Greiner
IMTEK-Institute for Microsystem IMTEK-Institute for Microsystem
Technology Technology
Faculty for Applied Sciences Faculty for Applied Sciences
Albert Ludwig University Freiburg Albert Ludwig University Freiburg
D-79110 Freiburg D-79110 Freiburg
Germany Germany

This book was carefully produced. Nevertheless, authors, editors and
publisher do not warrant the information contained therein to be free of
errors. Readers are advised to keep in mind that statements, data,
illustrations, procedural details or other items may inadvertently be
inaccurate.

Library of Congress Card No.: applied for.
British Library Cataloguing-in-Publication Data:
A catalogue record for this book is available from the British Library.

Die Deutsche Bibliothek — CIP-Cataloguing-in-Publication Data
A catalogue record for this book is available from Die Deutsche
Bibliothek.
ISBN 3-527-30257-3

© WILEY-VCH Verlag GmbH, Weinheim 2002

Printed on acid-free paper
.
All rights reserved (including those of translation into other languages).
No part of this book may be reproduced in any form — by photoprinting,
microfilm, or any other means — nor transmitted or translated into
machine language without written permission from the publishers.
Registered names, trademarks, etc. used in this book, even when not
specifically marked as such, are not to be considered unprotected by law.
Printing: Strauss Offsetdruck GmbH, Mörlenbach
Bookbinding: Litges & Dopf Buchbinderei GmbH, Heppenheim
Printed in the Federal Republik of Germany