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Figure 39. Lithography Inspection Station Table, Stool,
and Magnifying Glass 215
Figure 40. Attribute Gauge R&R Dialog Box and Data Layout 219
Figure 41. MINITAB “Agreement Within Appraiser” 220
Figure 42. Plot of “Agreement Within Appraiser” 220
Figure 43. MINITAB “Agreement of Appraiser with Standard” 221
Figure 44. Plot of “Agreement of Appraiser with Standard” 221
Figure 45. MINITAB “Appraiser Disagreement” 222
Figure 46. MINITAB “Agreement Between Appraisers” 222
Figure 47. MINITAB “Assessment vs. Standard Agreement
Across All Appraisers” 223
Figure 48. Excel Spreadsheet for RTY 225
Figure 49. Excel Spreadsheet for Calculating Normalized Yield 227
Figure 50. Finding RTY Using Simulation Software 229
Tables
Table 1. Instructions for Completing the Project Charter
Statement Form 4
Table 2. Strategies for Meeting the Project Goals 24
Table 3. Tools Useful in Risk Assessment 75
Table 4. Risk Planning vs. Impact and Likelihood of
Threatening Events 75
Table 5. Risk Response Planning Tools 78
Table 6. FMEA Severity, Likelihood, Detectibility Rating Guidelines 102
Table 7. FMEA Information 104
Table 8. Phases in Process Optimization 141
Table 9. Typical DMAIC Project Tasks and Responsibilities 152
Table 10. Local and Global Importance Weights 182
Table 11. Example of Using Global Weights in Assessing Alternatives 183
Table 12. Dysfunctional Process Symptoms and Underlying Diseases 185
Table 13. Illustration of the Pareto Priority Index (PPI) 186
Table 14. Throughput Priority of CTx Projects That Affect
the Constraint 189
Table 15. Project Throughput Priority vs. Project Focus 189
Table 16. Possible Information to Be Captured 195
Table 17. A Typical View of Six Sigma Projects 195
Table 18. Attribute Measurement Concepts 210
Table 19. Methods of Evaluating Attribute Inspection 213
Table 20. Results of Lithography Attribute Inspection Study 215
Table 21. Inspector Accuracies 216
Table 22. Repeatability and Pairwise Reproducibility for
Both Days Combined 216
Table 23. Stability Analysis 217
Table 24. Calculations Used to Find RTY 224
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