Page 18 - An Introduction to Microelectromechanical Systems Engineering
P. 18
(Courtesy of: Engineering & Science, California Institute of Technology, Pasadena, California.)
“It was the best of times, it was the worst of times, it was the age of wisdom, it was
the age of foolishness…” from A Tale of Two Cities by Charles Dickens, engraved
on a thin silicon nitride membrane. The entire page measures a mere 5.9 µmona
side, sufficiently small that 60,000 pages—equivalent to the Encyclopedia Britan-
nica—can fit on a pinhead. The work, by T. Newman and R. F. W. Pease of Stan-
ford University, won the Feynman challenge in 1985.
