Page 21 - An Introduction to Microelectromechanical Systems Engineering

xx Preface to First Edition

Chapter 4—The Gearbox: Commercial MEM Structures and Systems. This
chapter includes descriptions of a select list of commercially available
micromachined sensors and actuators. The discussion includes the basic principle of
operation and a corresponding fabrication process for each device. Among the
devices are pressure and inertial sensors, a microphone, a gas sensor, valves, an
infrared imager, and a projection display system.
Chapter 5—The New Gearbox: A Peek into the Future. The discussion in this
chapter centers on devices and systems still under development but with significant
potential for the future. These include biochemical and genetic analysis systems,
high-frequency components, display elements, pumps, and optical switches.
Chapter 6—The Box: Packaging for MEMS. The diverse packaging require-
ments for MEMS are reviewed in this chapter. The basic techniques of packaging
sensors and actuators are also introduced. A few nonproprietary packaging solu-
tions are described.
The writing of a book usually relies on the support and encouragement of col-
leagues, friends, and family members. This book is no exception. I am grateful to Al
Pisano for his general support and for recognizing the value of an introductory book
on MEMS. I would like to thank Greg Kovacs, Kirt Williams, and Denise Salles for
reading the manuscript and providing valuable feedback. They left an indelible mark
of friendship on the pages of the book. I am thankful to many others for their com-
ments, words of encouragement, and contributions. To Bert van Drieënhuizen,
Dominik Jaeggi, Bonnie Gray, Jitendra Mohan, John Pendergrass, Dale Gee, Tony
Flannery, Dave Borkholder, Sandy Plewa, Andy McQuarrie, Luis Mejia, Stefani
Yee, Viki Williams, and the staff at NovaSensor, I say, “Thank you!” Jerry Gist’s
artistic talents proved important in designing the book cover. For those I inadver-
tently forgot to mention, please forgive me. I am also grateful to DARPA for provid-
ing partial funding under contract N66001-96-C-8631. Last, but not least, words
cannot duly express my gratitude and love to my wife, Tanya. She taught me over
the course of writing this book the true meaning of love, patience, dedication, under-
standing, and support. I set out in this book to teach technology, but I finished learn-
ing from her about life.

Nadim Maluf

August 1999