Page 25 - An Introduction to Microelectromechanical Systems Engineering

4 MEMS: A Technology from Lilliput

Table 1.1 Examples of Present and Future Application Areas for MEMS
Commercial Applications Invasive and noninvasive biomedical sensors
Miniature biochemical analytical instruments
Cardiac management systems (e.g., pacemakers, catheters)
Drug delivery systems (e.g., insulin, analgesics)
Neurological disorders (e.g., neurostimulation)
Engine and propulsion control
Automotive safety, braking, and suspension systems
Telecommunication optical fiber components and switches
Mass data storage systems
RF and wireless electronics
Distributed sensors for condition-based maintenance and monitoring
structural health
Distributed control of aerodynamic and hydrodynamic systems
Military Applications Inertial systems for munitions guidance and personal navigation
Distributed unattended sensors for asset tracking, and environmental
and security surveillance
Weapons safing, arming, and fusing
Integrated microoptomechanical components for identify-friend-or-foe
systems
Head- and night-display systems
Low-power, high-density mass data storage devices
Embedded sensors and actuators for condition-based maintenance
Integrated fluidic systems for miniature propellant and combustion control
Miniature fluidic systems for early detection of threats from biological and
chemical agents
Electromechanical signal processing for small and low-power wireless
communication
Active, conformable surfaces for distributed aerodynamic control of aircraft

Arguably, the birth of the first micromachined components dates back many
decades, but it was the well-established integrated circuit industry that indirectly
played an indispensable role in fostering an environment suitable for the develop-
ment and growth of micromachining technologies. As the following chapters will
show, many tools used in the design and manufacturing of MEMS products are
“borrowed” from the integrated circuit industry. It should not then be surprising
that micromachining relies on silicon as a primary material, even though the tech-
nology has certainly been demonstrated using other materials.

Applications and Markets

Present markets are primarily in pressure and inertial sensors, inkjet print heads
dominated by the Hewlett-Packard Co. of Palo Alto, California, and high-resolution
digital displays with Texas Instruments of Dallas, Texas, being a leader in this mar-
ket. Future and emerging applications include tire pressure sensing, RF and wireless
electronics, fiber optical components, and fluid management and processing devices
for chemical microanalysis, medical diagnostics, and drug delivery (see Table 1.1).
While estimates for MEMS markets vary considerably, they all show significant
present and future growth, reaching aggregate volumes in the many billions of