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Theory of Inventive Problem Solving (TRIZ)  321


                                     Wire
                                                         Current
                                     Coating

             Example 9.19 Change the Space Structure of the Field
             Old design

                               Infrared lamp
                                                 Spiral (1)
                                                                  1
                                     Infrared
                                     beams
                                                                  2
                                                 Semiconductor
                                                 wafer (2)
                     Semiconductor wafer


             An infrared lamp heats a semiconductor wafer. (Disadvantage: The wafer
             heats unevenly; the edges cool down faster than the center portion.)
             New design

                               Infrared lamp     Spiral with
                                                 uniform pitch (1)
                                                                  1
                                     Infrared
                                     beams
                                                                  2
                                                 Semiconductor
                                                 wafer (2)
                     Semiconductor wafer



             It is proposed to make the lamp heat uniformly. The lamp spiral heating ele-
             ment is made with a smaller winding pitch near the outer edges. This lamp
             produces an uneven heat flow which compensates for nonuniform cooling in
             the wafer.

           9.6.2   Methods to eliminate or contain
           harmful functions
           When a harmful function is delivered, we have:

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                                 Subject           Object
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