Page 258 - Inorganic Mass Spectrometry - Fundamentals and Applications
P. 258

244                                                       ~el~ore

            plemented  with three new types of instruments  constructed or modified from  more
                                                 of
            standard  designs  to  accomplish  specific  types measurements:
                 1.  An  ion  imaging  instrument  [S]  for imaging  the  regions  on  an  emitter
                    from  which  ions  are  originating
                 2.  An iodneutral mass  spectrometer [7] that allows the ions and the neu-
                    trals (via  electron  bombardment  ionization)  volatilizing  from  the  emit-
                    ter to be  measured  in  sequence
                 3.  A secondary  ion  mass  spectrometer (SIMS) able to analyze the chemi-
                    cal composition  and  speciation of the  surface of ion  emitters at full op-
                    erating  temperature
                 Several new types of source  mounts  have also been  developed to allow  op-
            timal  placement  and  operation of the ion  emitters  in  these  instruments.  These in-
            struments  provide  complement^ information  on the properties of  ion  emitters
            that  are  helping  to  elucidate  the  mechanisms by  which  ion  emitters  function.  This
            knowledge  has  allowed the development of better  ion  emitters.




            Before  describing  sample  mounting  techniques is important to discuss  the issue
                                                  it
            of voltage  spread  across  an  ion emitting surface  and  the way it interacts  with the
                                                                       of
            extraction  and  focusing of the  emitted ions, This is a  very  important  aspect both
            the  experimental  apparatus  and the implementation  in  useful  ion  sources.  In  ther-
            mal  ionization  (and  in SMS), the single  most  important  element  in the ion lens
            system is the sample itself. This is because the ions are  at  their  lowest  velocity just
            as  they  are  emitted from the sample surface,  and  thus  their  flight  paths  are  more
            readily  altered by either electric or magnetic  fields.  Another  aspect of this issue is
            that it is physically more difficult to design  and  build  a  useful  ion  emitter/ion lens
            with  a  high  level of symmetry  around the emitter than for the  rest of the lens. Any
            minor  irregularities  in  the  electrostatic  fields  in the region  near  the emitter have  a
            far greater  effect  than  in  regions after the initial acceleration of the  ions. This is
            why  the NBS style mass  spectrometer is operated  with  a  nearly  field-free  region
                                                         is
            su~ounding the filaments  when  a  triple-filament  source used,  and it is operated
            with a substantial  draw-out  voltage  when  a  single-fila~ent source is used. The
            t~ple-filament assembly  adds  sufficient  electrostatic  asymmetry to the source  re-
                                               be
            gion  that  only  a  weak  draw-out  voltage  can tolerated.
                 In general, it is important to maintain  electrostatic  symmetry  around  the  axis
            of  a lens that  has  cylindrical  geometry,  and  to maintain  electrostatic  symmetry
            along  the  y and z axes of a lens  with  planar  geometry.  Deflection  electrodes  vio-
            late this  rule,  but  they  are  generally  downstream  in the lens,  where  the  ions  have
            much  greater  velocity  and  hence  they  have less effect  on  the  focusing.  Also, the
            deflection  offset is quite small  when  the  source properly  aligned, mini~zing de-
                                                 is
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