Page 279 - Inorganic Mass Spectrometry - Fundamentals and Applications
P. 279

~nalysis  Noncond~ct~ve Sample Types                          265
                of
         lyte ion  beam  intensities. ~~o~unately, the  background  spectra for both  materials
                                                                  of
         are quite complex,  with  many  metal  dimers  present  at  high  levels.  Each the first
         three matrices  tends to yield  mass  spectra  that  have  a  large  amount metal  oxide
                                                               of
                                  MOH+) because of the presence of residual  gases.
          and  hydroxide  ions  (MO+  and
              To counter the negative  effects of water  vapor  on the observed  spectra,  alu-
         minum, iron, and  tantalum  (metals  with  high  affinities for water  and  air  species)
                                             act
          were  evaluated.  These  “getter”  metals  tend  to as  water  scavengers  as volatile
                                                                 the
          molecules  evolve into the  gas  phase  during the early  sputtering  times  as the sam-
          ple  temperature  rises. The removal of residual  vapor  produces  mass  spectra  that
          are more  atomic in nature  and  also  enhances the atomi~atio~excita~on processes
          for the  desired  analyte  species.  Iron,  being  multi-isotopic,  produces  a  more  com-
          plex  mass  spectrum  than  aluminum  and  tantalum  and  also  yields  greater  amounts
          of dimer  and  argide  ions.  Other  getter  elements  such  as  zirconium  and  titanium
          have  too  many isotopes in  themselves;  therefore  they  were  not  seen  as  viable  can-
          didates. Of the two  remaining  candidates,  tantalum  has  a  high  mass  and  higher
          sputtering  rates  that  make it the most  effective  matrix.  Across the range of matri-
          ces and  analytes  studied by  Tong  and  Harrison [39], data  were  tabulated to depict
          the direct  relationship  between the relative  amount of the oxides of  a  given  ele-
          ment  (specifically the MO+/(M+  + MO+> ratio) and  their  respective  metal-oxide
          bond  energies.  As would be expected,  the rare earth elements are most  affected  by
          the  presence of water  vapor  and  air,  and  some of these  elements  show  as  much  as
          a 10% oxide ion fraction [39]. Even so, as  shown  in  Fig. 7.1, high-quality  spectra
          were  obtained  with  the  use tantalum  as the host  matrix for a  mixture of rare  earth
                               of
          oxides.




          Just as  the  previously  cited work: illustrated the role of matrix  selection  in  the  qual-
          ity of the mass  spectra,  Mei  and  Harrison E401 studied the underlying  equilibrium
          involved  in  the  formation  and  removal of metal  oxides from the spectra of com-
          pacted  oxide  samples. The analyte for these studies was La20,, chosen  because of
          the  high  affinity of lanthanum for atomic  oxygen,  a  product of the  dissociation  of
          both  residual  air  and  water  vapor  in  compacted  samples.  Because La-0 bond
                                                               the
          strength is very  high (8.30 eV), this  oxide  represents  a case in  which  the  dissoci-
          ation of the  original  “analyte”  would be difficult  as  well.  On the basis of previous
                                               50% of the lanthanum  species  sput-
          studies [41], it was  assumed  that  approximately
          tered from the surface  would  be free La atoms,  and the other half  would exist as
          oxides of one  form or another.
               The GD plasma enviro~ent is an interesting vessel to study  gas-phase
          chemical  properties. The gettering  qualities of carbon,  silver,  tantalum,  titanium,
           and  tungsten  were  compared by Mei and  Harrison E401 on the basis of the atomic
           ion  fraction of  all of the observed  lanthanum species; R = La+/(La+ + Lao+) X
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