Page 287 - Inorganic Mass Spectrometry - Fundamentals and Applications

~nulysis o~~onconduct~ve ~u~ple Types 273

Intensities
1 Ed10
Ta
1 E-l 1
if-12
1 E-f 3

1 E-l4
1 E-l 5
1 E-t 6

l n ~ n ~ ~
1 E-10
l €-l I
IE-i2
1 E-l 3

iE-14
l E-l5
1 E-l 6
0 3 5 7 10 l2 14 17 19 21 22

Temporal profiles of Ta (mask) and Si (sample) ion signals of plasmas oper-
ated under different discharge conditions: a, voltage = 1 kV, Ar pressure = 5.9 X mbar;
b, voltage = 1 kV, Ar pressure = 4.3 X mbar; c, voltage = 1 kV, Ar pressure = 5.2 X
lo-, mbar, Note: pressure measured in intermediate region of VG 9000 instrument. prom
Ref. 21 .)