Page 20 - Sami Franssila Introduction to Microfabrication

Acknowledgements

Writing a book takes a lot of time, and numerous peo- Kestas Grigoras and Victor Ovtchinnikov. Charlotta
ple have contributed their time and effort at various Tuovinen has provided assistance with computers on
stages of this project. Jyrki Kaitila, Andreas Englm¨ uller, countless occasions.
Olli Anttila, Risto Mutikainen, Joni Mellin, Ari Lehto My students and teaching assistants Tuuli Juvonen,
and Tarja Rahikainen read through the manuscript in its Antti Niskanen, Santeri Tuomikoski, Esa Tuovinen and
nascent state, and provided essential input into organi- Seppo Marttila have been guinea pigs for the reading of
zation of the book. Their interest in both details and the text and exercises. They have lived to tell the tale!
overall structure is much appreciated. Pekka Kuivalainen and Ari Sihvola are acknowledged
A far larger group of people have contributed to for their encouragement in teaching, in general, and in
selected parts of the book by providing me with textbook writing, in particular.
data, micrographs and photos; they have led me Peter Mitchell, Kathryn Sharples, C´ eline Durand and
to useful sources, pointed out gaps and corrected Susan Barclay at Wiley have brought the project to
my text. Thanks are due to Bo B¨ angtsson, Martin completion through face-to-face meetings and numerous
Kulawski, Klas Hjort, Arturo Ayon, Pekka Sepp¨ al¨ a, e-mails.
Robert Eichinger-Heue, Marin Alexe, Markku Tilli, Omissions and factual errors remain my sole respon-
Juha Rantala, Jyrki Kiiham¨ aki, Weileun Fang, Mikko sibility.
Ritala, Martti Blomberg, Jaakko Saarilahti, Hannu Kat-
telus, Mikko Kiviranta, Veli-Matti Airaksinen, Paula
Heikkil¨ a, Harri Pohjonen, Jouni Ahopelto, Antti Lip- Sami Franssila
sanen, Jari Likonen, Eero Haimi, Ulrika Gyllenberg, Helsinki, February 29, 2004