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The MEMS Handbook                                                  Second Edition









              MEMS












              Design and






              Fabrication



























                                                                                     Edited by


                                         Mohamed Gad-el-Hak




















                                                     Boca Raton   London   New York
                                     A CRC title, part of the Taylor & Francis imprint, a member of the
                                     Taylor & Francis Group, the academic division of T&F Informa plc.




             © 2006 by Taylor & Francis Group, LLC
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