Page 5 -

Foreground: A 24-layer rotary varactor fabricated in nickel using the Electrochemical Fabrication (EFAB®) technology.
See Chapter 6 for details of the EFAB® technology. Scanning electron micrograph courtesy of Adam L. Cohen, Microfabrica
Incorporated (www.microfabrica.com), U.S.A.
Background: A two-layer, surface micromachined, vibrating gyroscope. The overall size of the integrated circuitry is 4.5 × 4.5
mm. Sandia National Laboratories' emblem in the lower right-hand corner is 700 microns wide. The four silver rectangles in the
center are the gyroscope's proof masses, each 240 × 310 × 2.25 microns. See Chapter 4, MEMS: Applications (0-8493-9139-3),
for design and fabrication details. Photography courtesy of Andrew D. Oliver, Sandia National Laboratories.

Published in 2006 by
CRC Press
Taylor & Francis Group
6000 Broken Sound Parkway NW, Suite 300
Boca Raton, FL 33487-2742
© 2006 by Taylor & Francis Group, LLC
CRC Press is an imprint of Taylor & Francis Group
No claim to original U.S. Government works
Printed in the United States of America on acid-free paper
10 9 8 7 6 5 4 3 2 1

International Standard Book Number-10: 0-8493-9138-5 (Hardcover)
International Standard Book Number-13: 978-0-8493-9138-5 (Hardcover)
Library of Congress Card Number 2005050109

This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with
permission, and sources are indicated. A wide variety of references are listed. Reasonable efforts have been made to publish
reliable data and information, but the author and the publisher cannot assume responsibility for the validity of all materials
or for the consequences of their use.

No part of this book may be reprinted, reproduced, transmitted, or utilized in any form by any electronic, mechanical, or
other means, now known or hereafter invented, including photocopying, microfilming, and recording, or in any information
storage or retrieval system, without written permission from the publishers.
For permission to photocopy or use material electronically from this work, please access www.copyright.com
(http://www.copyright.com/) or contact the Copyright Clearance Center, Inc. (CCC) 222 Rosewood Drive, Danvers, MA
01923, 978-750-8400. CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For
organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged.
Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for
identification and explanation without intent to infringe.

Library of Congress Cataloging-in-Publication Data

MEMS : design and fabrication / edited by Mohamed Gad-el-Hak.
p. cm. -- (Mechanical engineering series (Boca Raton, Fla.))
Includes bibliographical references and index.
ISBN 0-8493-9138-5 (alk. paper)
1. Microelectromechanical systems. 2. Microelectromechanical systems--Design and construction. 3.
Microfabrication. I. Gad-el-Hak, M. II. Series.

TK7875.M46 2005
621.381--dc22 2005050109

Visit the Taylor & Francis Web site at
http://www.taylorandfrancis.com

Taylor & Francis Group and the CRC Press Web site at
is the Academic Division of Informa plc. http://www.crcpress.com

© 2006 by Taylor & Francis Group, LLC