Page 3 - Mechanical design of microresonators _ modeling and applications

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Design at Resonance of Mechanical Microsystems

2 Chapter One

(a) (b)
Figure 1.1 Single-component mechanical microresonators: (a) cantilever; (b) bridge.

(a) (b) (c)
Figure 1.2 Tuning-fork microresonators: (a) classical; (b) trident; (c) double-ended.

with small-dimension resonators) also contribute to increasing the
quality factor of a system, which is a measure of its resonant perfor-
mance. Smaller is also better, as Chap. 6 will demonstrate, in detecting
minute amounts of deposited substances as the capacity of capturing
the effects of mass at the cell level is inversely proportional to the geo-
metric dimensions of a mechanical resonator.
Constructively, the mechanical microresonators can be cantilevers,
as sketched in Fig. 1.1a; bridges, as in Fig. 1.1b; tuning forks, as shown
in Fig. 1.2a, b, and c. Or they can be of a more complex geometry, such
as the lateral resonator design with folded-beam suspensions illus-
trated in Fig. 1.3. More details regarding these mechanical resonators,
as well as more resonator structures, are presented in subsequent
chapters of this book.
This chapter analyzes the main aspects of single- and multiple-
degree-of-freedom mechanical microresonators by discussing the mod-
els that are utilized to characterize and design these devices.

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