Page 264 - Mechanics of Microelectromechanical Systems
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4. Microtransduction: actuation and sensing 251
Figure 4.58 Generic multimorph beam: (a) side view with undeformed geometry; (b) close-
up of bent segment
Equation (4.159) can be rewritten as:
By successively applying Eq. (4.161), the force on a particular layer can be
expressed in terms of the force on the previous layer, which, in turn, depends