Page 265 - Mechanics of Microelectromechanical Systems

252 Chapter 4
on the force of the previous layer, and so on, such that, in the end, the
particular force is expressed in terms of Also demonstrated in [ 12] is that
the generic force is expressed as:

with:

and:

The curvature radius can be expressed as:

The individual moments which are produced by pure bending about each
individual neutral (symmetry) axis are defined as:

The total bending moment can therefore be calculated as:

Example 4.19
Determine the curvature radius in a three-layer multimorph cantilever
having the characteristics given in Table 1 in the case of applying a
temperature increase of The length of the composite cantilever is