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Index

µ-TAS, 163 amount of reagent, 165
3-D microstructures, 7, 152 anisotropic etching, 3
3-D recording, 193 antireflection, 68
3-D trapping, 131 antireflection coating design, 71
O 2 RIE, 151 antireflection-coated (ARC), 63, 76
(SiO) (Si 3N 4) 1−x,63 antireflection-coated LD, 45, 64
x
AgO , 204 aperture probe, 180
x
Au/Si 3N 4/Au, 68 aperture-type super-RENS, 203
apertureless probe, 180
a-SiN:H (hydrogenated amorphous apertureless scattering probe, 168
silicon nitride), 66 applications of optical tweezers, 113
absorbing boundary conditions (ABCs), artifact problem, 185
173 as-depo, 202
accelerometers, 3 Ashkin, 83
actin filament, 114 aspect ratio, 5
actin–myosin interaction, 115 ATPase, 114
adhesion, 149 attachment error, 42, 43
¨
Auger electron spectroscopy, 66 attenuated total reflection (ATR), 167
Ag cluster, 208 average flux amount, 159
Ag nanocluster, 204 axial trapping efficiency, 90, 92
Ag nanoparticle, 199
Ag particles, 207 bacteria, 113
Ag ring, 204, 211 bacterial flagella, 113
Ag-Super-RENS, 204 baking, 149
AgInSbTe, 199 beam expander, 104
agitation, 153 beam waist, 36, 93, 123, 128
agitation efficiency, 161 beam waist position, 131
AgOx decomposition, 206 beat frequency, 26
air bearing, 42 beyond the diffraction limit, 190
air gap, 50 bimetallic MC, 69
Al-coated fiber probe, 196 bimorph, 68
aligning, 103 bimorph design, 68
AlN slider, 64 bio MEMS, 18