Page 3 - Principles and Applications of NanoMEMS Physics

MICROSYSTEMS

Series Editor
Stephen D. Senturia
Massachusetts Institute of Technology
Editorial Board

Roger T. Howe, University of California, Berkeley
D. Jed Harrison, University of Alberta
Hiroyuki Fujita, University of Tokyo
Jan-Ake Schweitz, Uppsala University
OTHER BOOKS IN THE SERIES:

x Optical Microscanners and Microspectrometers Using Thermal Bimorph Actuators
Series: Microsystems, Vol. 14
Lammel, Gerhard, Schweizer, Sandra, Renaud, Philippe
2002, 280 p., Hardcover, ISBN: 0-7923-7655-2
x Optimal Synthesis Methods for MEMS
Series: Microsystems, Vol. 13
Ananthasuresh, S.G.K. (Ed.)
2003, 336 p., Hardcover, ISBN: 1-4020-7620-7
x Micromachined Mirrors
Series: Microsystems, Vol. 12
Conant, Robert
2003, XVII, 160 p., Hardcover, ISBN: 1-4020-7312-7
x Heat Convection in Micro Ducts
Series: Microsystems, Vol. 11
Zohar, Yitshak
2002, 224 p., Hardcover, ISBN: 1-4020-7256-2
x Microfluidics and BioMEMS Applications
Series: Microsystems, Vol. 10
Tay, Francis E.H. (Ed.)
2002, 300 p., Hardcover, ISBN: 1-4020-7237-6
x Materials & Process Integration for MEMS
Series: Microsystems, Vol. 9
Tay, Francis E.H. (Ed.)
2002, 300 p., Hardcover, ISBN: 1-4020-7175-2
x Scanning Probe Lithography
Series: Microsystems, Vol. 7
Soh, Hyongsok T., Guarini, Kathryn Wilder, Quate, Calvin F.
2001, 224 p., Hardcover
ISBN: 0-7923-7361-8
x Microscale Heat Conduction in Integrated Circuits and Their Constituent Films
Series: Microsystems, Vol. 6
Sungtaek Ju, Y., Goodson, Kenneth E.
1999, 128 p., Hardcover, ISBN: 0-7923-8591-8
x Microfabrication in Tissue Engineering and Bioartificial Organs
Series: Microsystems, Vol. 5
Bhatia, Sangeeta
1999, 168 p., Hardcover, ISBN: 0-7923-8566-7
x Micromachined Ultrasound-Based Proximity Sensors
Series: Microsystems, Vol. 4
Hornung, Mark R., Brand, Oliver
1999, 136 p., Hardcover, ISBN: 0-7923-8508-X