Page 7 - Principles and Applications of NanoMEMS Physics

CONTENTS

Preface xiii
Acknowledgments xv

1. NANOELECTROMECHANICAL SYSTEMS 1
1.1 NanoMEMS Origins 1
1.2 NanoMEMS Fabrication Technologies 3
1.2.1 Conventional IC Fabrication Process 4
1.2.1.1 Spin-Casting 4
1.2.1.2 Wafer Patterning 5
1.2.1.2.1 Lithography 6
1.2.1.2.2 Photoresist 8
1.2.1.3 Etching 9
1.2.1.3.1 Wet Etching 10
1.2.1.3.2 Dry Etching 11
1.2.1.4 Chemical Vapor Deposition 13
1.2.1.5 Sputtering 15
1.2.1.6 Evaporation 16
1.2.2 MEMS Fabrication Methods 16
1.2.2.1 Surface Micromachining 17
1.2.2.2 Bulk Micromachining 18
1.2.2.3 Deep Reactive Ion Etching 20
1.2.2.4 Single Crystal Silicon Reactive Etch and Metal 21
1.2.3 Nanoelectronics Fabrication Elements 22
1.2.3.1 Electron Beam Lithography 22

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