Page 12 - Principles and Applications of NanoMEMS Physics

PREFACE

This book presents a unified exposition of the physical principles at the
heart of NanoMEMS-based devices and applications. NanoMEMS exploits
the convergence between nanotechnology and microelectromechanical
systems (MEMS) brought about by advances in the ability to fabricate
nanometer-scale electronic and mechanical device structures. In this context,
NanoMEMS-based applications will be predicated upon a multitude of
physical phenomena, e.g., electrical, optical, mechanical, magnetic, fluidic,
quantum effects and mixed domain.
Principles and Applications of NanoMEMS Physics contains five
chapters. Chapter 1 provides a comprehensive presentation of the
fundamentals and limitations of nanotechnology and MEMS fabrication
techniques. Chapters 2 and 3 address the physics germane to this
dimensional regime, namely, quantum wave-particle phenomena, including,
the manifestation of charge discreteness, quantized electrostatic actuation,
and the Casimir effect, and quantum wave phenomena, including, quantized
electrical conductance, quantum interference, Lüttinger liquids, quantum
entanglement, superconductivity and cavity quantum electrodynamics.
Chapter 4 addresses potential building blocks for NanoMEMS applications,
including, nanoelectromechanical quantum circuits and systems (NEMX)
such as charge detectors, the which-path electron interferometer, and the
Casimir oscillator, as well as a number of quantum computing
implementation paradigms, including, the ion-trap qubit, the NMR-qubit,
superconducting qubits, and a semiconductor qubit. Finally, Chapter 5
presents NanoMEMS applications in photonics, particularly focusing on the

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