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technique is not confined to simple substance-identity confirmation or structure elucidation.
C. de St. Etienne and J. Mettes used the GC/MS instrument to assay the purity of silane. Silane of high
purity is required by the electronics industry for the fabrication of integrated circuits and as amorphous
silica in photovoltaic applications. The author used a IGC gas chromatograph fitted with a katherometer
detector and a packed stainless steel column, 13.2 m long, 3.17 mm I.D., containing Chromosorb PAW
45/60 mesh, coated with 28% of DC 200 stationary phase. Helium was used as the carrier gas at a flow
rate of 20 ml/min. The column eluent was split through a low-dead-volume splitter directly to the mass
spectrometer.
Figure 5.17.
Total Ion Current Chromatograms of Silane Samples (ref 15)
