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0066_Frame_C08  Page 4  Wednesday, January 9, 2002  3:48 PM









                       rotations do not cause deformation of the body, they do not affect the internal stress field either. In fact,
                       the latter is a function of the gradient of the displacement, called deformation gradient.  When this
                       gradient is small, a linear relationship between the displacements and strains can be used

                          e x =  --------, e y =  --------, e z =  --------, e xy =  -------- +  --------, e xz =  -------- + --------, e zy =  -------- +  ∂u y  (8.14)
                                                               ∂u y
                                       ∂u y
                              ∂u x
                                                                                       ∂u z
                                                ∂u z
                                                          ∂u x
                                                                             ∂u z
                                                                        ∂u x
                                                                                            --------
                              ∂x       ∂y       ∂z        ∂y   ∂x        ∂z   ∂x        ∂y  ∂z
                         The conservation of momentum and kinematic relations does not contain any information about the
                       material. Constitutive laws provide this additional information. The most common such law describes a
                       linear elastic material and can be conveniently expressed using a symmetric matrix c ij , called stiffness matrix:
                                           T xx   c 11  c 12  c 13 c 14 c 15 c 16  e x
                                           T yy         c 22  c 23 c 24 c 25 c 26  e y
                                               =                            ⋅                    (8.15)
                                           T zz              c 33 c 34 c 35 c 36  e z
                                           T yz                  c 44 c 45 c 46  e yz
                                                      symm.
                                           T zx                      c 55 c 56  e zx
                                           T xy                          c 66  e xy
                       In the most general case, the matrix c ij  has 21 independent elements. When the material has a crystal
                       symmetry, the number of independent constants is reduced. For example, single crystal Si is a common
                       structural material in MEMS with a cubic symmetry. In this case there are only three independent
                       constants:

                                                                  0   0   0
                                            T xx  c 11  c 12  c 12             e x
                                                                  0   0   0
                                            T yy        c 11  c 12             e y
                                                                  0   0   0
                                            T zz              c 11          ⋅  e z
                                                =                                                (8.16)
                                                                      0   0
                                            T yz                 c 44         e yz
                                                      symm.               0
                                            T zx                     c 44     e zx
                                            T xy                         c 44  e xy
                       If the material is isotropic (amorphous or polycrystalline), the number of independent elastic constants
                       is further reduced to two by the relation c 44  = (c 11  − c 12 )/2. The elastic constants of several most commonly
                       used materials are listed in Table 8.1 (from [Kittel 1996]).
                         Additional information on other symmetry classes can be found in [Nye 1960].

                                         TABLE 8.1  Elastic Constants of Several Common Cubic
                                         Crystals
                                                                               11
                                                   Stiffness Constants at Room Temperature, 10  N/m 2
                                         Crystal    c 11          c 12          c 44
                                         W         5.233         2.045         1.607
                                         Ta        2.609         1.574         0.818
                                         Cu        1.684         1.214         0.754
                                         Ag        1.249         0.937         0.461
                                         Au        1.923         1.631         0.420
                                         Al        1.608         0.607         0.282
                                         K         0.0370        0.0314        0.0188
                                         Pb        0.495         0.423         0.149
                                         Ni        2.508         1.500         1.235
                                         Pd        2.271         1.761         0.17
                                         Si        1.66          0.639         0.796


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