Page 287 - The Mechatronics Handbook

14

Rotational

and Translational

Microelectromechanical

Systems: MEMS

Synthesis,

Microfabrication,

Analysis,

and Optimization

14.1 Introduction
14.2 MEMS Motion Microdevice Classifier
and Structural Synthesis
14.3 MEMS Fabrication
Bulk Micromachining • Surface Micromachining
• LIGA and LIGA-Like Technologies
14.4 MEMS Electromagnetic Fundamentals
and Modeling
14.5 MEMS Mathematical Models
Example 14.5.1: Mathematical Model of the Translational
Microtransducer • Example 14.5.2: Mathematical Model
of an Elementary Synchronous Reluctance Micromotor
• Example 14.5.3: Mathematical Model of Two-Phase
Permanent-Magnet Stepper Micromotors • Example 14.5.4:
Mathematical Model of Two-Phase Permanent-Magnet
Synchronous Micromotors
14.6 Control of MEMS
Proportional-Integral-Derivative Control • Tracking
Control • Time-Optimal Control • Sliding Mode
Control • Constrained Control of Nonlinear MEMS:
Hamilton–Jacobi Method • Constrained Control of
Nonlinear Uncertain MEMS: Lyapunov Method
Sergey Edward Lyshevski • Example 14.6.1: Control of Two-Phase
Permanent-Magnet Stepper Micromotors
Purdue University Indianapolis 14.7 Conclusions

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