Page 288 - The Mechatronics Handbook

14.1 Introduction

Electromagnetic-based MEMS are widely used in various sensing and actuation applications. For these
MEMS, rotational and translational motion microdevices are needed to be devised, designed, and con-
trolled. We introduce the classifier paradigm to perform the structural synthesis of MEMS upon electro-
magnetic features. As motion microdevices are devised, the following issues are emphasized: modeling,
analysis, simulation, control, optimization, and validation. Innovative results are researched and studied
applying the classifier, structural synthesis, design, analysis, and optimization concepts developed. The
need for innovative integrated methods to perform the comprehensive analysis, high-fidelity modeling,
and design of MEMS has facilitated theoretical developments within the overall spectrum of engineering
and science. This chapter provides one with viable tools to perform structural synthesis, modeling, analysis,
optimization, and control of MEMS.
Microelectromechanical systems integrate motion microstructures and devices as well as ICs on a
single chip or on a hybrid chip. To fabricate MEMS, modified advanced microelectronics fabrication
technologies, techniques, processes, and materials are used. Due to the use of complementary metal oxide
semiconductor (CMOS) lithography-based technologies in fabrication microstructures, microdevices,
and ICs, MEMS leverage microelectronics.
The following definition for MEMS was given in [1]:
Batch-fabricated microscale devices (ICs and motion microstructures) that convert physical parame-
ters to electrical signals and vice versa, and in addition, microscale features of mechanical and electrical
components, architectures, structures, and parameters are important elements of their operation and
design.
The scope of MEMS has been further expanded towards devising novel paradigms, system-level inte-
gration high-fidelity modeling, data-intensive analysis, control, optimization, fabrication, and implemen-
tation. Therefore, we define MEMS as:
Batch-fabricated microscale systems (motion and radiating energy microdevices/microstructures—
driving/sensing circuitry—controlling/processing ICs) that

1. convert physical stimuli, events, and parameters to electrical and mechanical signals and vice versa,
2. perform actuation and sensing,
3. comprise control (intelligence, decision making, evolutionary learning, adaptation, self-organization,
etc.), diagnostics, signal processing, and data acquisition features,
and microscale features of electromechanical, electronic, optical, and biological components (structures,
devices, and subsystems), architectures, and operating principles are basics of their operation, design,
analysis, and fabrication.
The integrated design, analysis, optimization, and virtual prototyping of intelligent and high-performance
MEMS, system intelligence, learning, adaptation, decision making, and self-organization can be add-
ressed, researched, and solved through the use of advanced electromechanical theory, state-of-the-art
hardware, novel technologies, and leading-edge software. Many problems in MEMS can be formulated,
attacked, and solved using the microelectromechanics. In particular, microelectromechanics deals with
benchmarking and emerging problems in integrated electrical–mechanical–computer engineering, sci-
ence, and technologies. Microelectromechanics is the integrated design, analysis, optimization, and virtual
prototyping of high-performance MEMS, system intelligence, learning, adaptation, decision making, and
control through the use of advanced hardware, leading-edge software, and novel fabrication technologies
and processes. Integrated multidisciplinary features approach quickly, and the microelectromechanics
takes place.
The computer-aided design tools are required to support MEMS analysis, simulation, design, optimi-
zation, and fabrication. Much effort has been devoted to attain the specified steady-state and dynamic
performance of MEMS to meet the criteria and requirements imposed. Currently, MEMS are designed,
optimized, and analyzed using available software packages based on the linear and steady-state analysis.

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