Page 78 - Tunable Lasers Handbook
P. 78
3 Tunable Excimer Lasers 9
stored in the peaking capacitors represents a very small part of the energy
deposited into the gas. However, even this small capacitance is enough to result
in a modulation of the power deposition, as shown in the output waveform given
in Fig. 23. Experiments show that for stable discharges in the hundreds of
nanosecond timescales an inductance value that gives an impedance correspond-
ing to a 5% change in voltage across the inductor compared to the voltage drop
across the discharge gap is sufficient to suppress arcing.
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