Page 32 - An Introduction to Microelectromechanical Systems Engineering

Summary 11

• Micro Electro Mechanical Systems Workshop (MEMS): an international
meeting held annually and sponsored by the IEEE.
• International Society for Optical Engineering (SPIE): regular conferences
held in the United States and sponsored by SPIE of Bellingham, Washington.
• Micro Total Analysis Systems (µTAS): a conference focusing on microanalyti-
cal and chemical systems. It is an annual meeting and alternates between
North America and Europe.

Summary

Microelectromechanical structures and systems are miniature devices that enable the
operation of complex systems. They exist today in many environments, espe-
cially automotive, medical, consumer, industrial, and aerospace. Their potential for
future penetration into a broad range of applications is real, supported by strong
development activities at many companies and institutions. The technology consists
of a large portfolio of design and fabrication processes (a toolbox), many borrowed
from the integrated circuit industry. The development of MEMS is inherently inter-
disciplinary, necessitating an understanding of the toolbox as well as of the end
application.

References

[1] Dr. Albert Pisano, in presentation material distributed by the U.S. DARPA, available at
http://www.darpa.mil.
[2] System Planning Corporation, “Microelectromechanical Systems (MEMS): An SPC Market
Study,” January 1999, 1429 North Quincy Street, Arlington, VA 22207.
[3] Frost and Sullivan, “World Sensors Market: Strategic Analysis,” Report 5509-32, February
1999, 2525 Charleston Road, Mountain View, CA 94043, http://www.frost.com.
[4] Frost and Sullivan, “U.S. Microelectromechanical Systems (MEMS),” Report 5549-16,
June 1997, 2525 Charleston Road, Mountain View, CA 94043, http://www.frost.com.
[5] Intechno Consulting, “Sensors Market 2008,” Steinenbachgaesslein 49, CH-4051, Basel,
Switzerland, http://www.intechnoconsulting.com.
[6] In-Stat/MDR, “Got MEMS? Industry Overview and Forecast,” Report IN030601EA,
August 2003, 6909 East Greenway Parkway, Suite 250, Scottsdale, AZ 85254,
http://www.instat.com.
[7] WTC Wicht Technologie Consulting, “The RF MEMS Market 2002–2007,” Frauenplatz
5, D-80331 München, Germany, http://www.wtc-consult.de.
[8] Yole Développement, “World MEMS Fab,” 45 Rue Sainte Geneviève, 69006 Lyon, France,
http://www.yole.fr.
[9] Public Citizen, Inc., et al. v. Norman Mineta, Secretary of Transportation, Docket No.
02-4237, August 6, 2003, United States Court of Appeals, Second Circuit, New York,
http://www.ca2.uscourts.gov.
[10] “IC Makers Gear Up for New Tire Pressure Monitor Rule,” Electronic Engineering Times,
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[11] Roylance, L. M., and J. B. Angell, “A Batch Fabricated Silicon Accelerometer,” IEEE
Trans. Electron Devices, Vol. 26, No. 12, 1979, pp. 1911–1917.
[12] Mercer Management Consulting, Inc., “New Technologies Take Time,” Business Week,
April 19, 1999, p. 8.