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12 MEMS: A Technology from Lilliput
Selected Bibliography
Angell, J. B., S. C. Terry, and P. W. Barth, “Silicon Micromechanical Devices,” Scientific
American, Vol. 248, No. 4, April 1983, pp. 44–55.
Gabriel, K. J., “Engineering Microscopic Machines,” Scientific American, Vol. 273, No. 3,
September 1995, pp. 150–153.
Micromechanics and MEMS: Classic and Seminal Papers to 1990, W. S. Trimmer (ed.),
New York: Wiley-IEEE Press, 1997.
“Nothing but Light,” Scientific American, Vol. 279, No. 6, December 1998, pp. 17–20.
Petersen, K. E., “Silicon As a Mechanical Material,” Proceedings of the IEEE, Vol. 70,
No. 5, May 1982, pp. 420–457.
