Page 5 - An Introduction to Microelectromechanical Systems Engineering

Library of Congress Cataloging-in-Publication Data
A catalog record for this book is available from the U.S. Library of Congress.

British Library Cataloguing in Publication Data
Maluf, Nadim.
An Introduction to microelectromechanical systems engineering–2nd ed. –(Artech House
microelectromechanical library)
1. Microelectromechanical systems
I. Title II. Williams, Kirt
621.3’81
ISBN 1-58053-590-9

Cover design by Igor Valdman

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International Standard Book Number: 1-58053-590-9
10987654321