Page 10 - An Introduction to Microelectromechanical Systems Engineering
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Contents ix
CHAPTER 4
MEM Structures and Systems in Industrial and Automotive Applications 79
General Design Methodology 79
Techniques for Sensing and Actuation 81
Common Sensing Methods 81
Common Actuation Methods 82
Passive Micromachined Mechanical Structures 85
Fluid Nozzles 85
Hinge Mechanisms 88
Sensors and Analysis Systems 89
Pressure Sensors 89
High-Temperature Pressure Sensors 93
Mass Flow Sensors 94
Acceleration Sensors 96
Angular Rate Sensors and Gyroscopes 104
Carbon Monoxide Gas Sensor 114
Actuators and Actuated Microsystems 116
Thermal Inkjet Heads 116
Micromachined Valves 119
Micropumps 126
Summary 128
References 129
Selected Bibliography 131
CHAPTER 5
MEM Structures and Systems in Photonic Applications 133
Imaging and Displays 133
Infrared Radiation Imager 133
Projection Display with the Digital Micromirror Device TM 135
Grating Light Valve™ Display 139
Fiber-Optic Communication Devices 141
Tunable Lasers 142
Wavelength Locker 151
Digital M × N Optical Switch 154
Beam-Steering Micromirror for Photonic Switches and Cross Connects 156
Achromatic Variable Optical Attenuation 161
Summary 165
References 165
Selected Bibliography 167
CHAPTER 6
MEMS Applications in Life Sciences 169
Microfluidics for Biological Applications 169
Pumping in Microfluidic Systems 170
Mixing in Microfluidics 171
DNA Analysis 172
