Page 8 - An Introduction to Microelectromechanical Systems Engineering
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Contents
Foreword xiii
Preface xv
Preface to First Edition xix
CHAPTER 1
MEMS: A Technology from Lilliput 1
The Promise of Technology 1
What Are MEMS—or MST? 2
What Is Micromachining? 3
Applications and Markets 4
To MEMS or Not To MEMS? 7
Standards 8
The Psychological Barrier 8
Journals, Conferences, and Web Sites 9
List of Journals and Magazines 9
List of Conferences and Meetings 10
Summary 11
References 11
Selected Bibliography 12
CHAPTER 2
Materials for MEMS 13
Silicon-Compatible Material System 13
Silicon 13
Silicon Oxide and Nitride 19
Thin Metal Films 20
Polymers 21
Other Materials and Substrates 21
Glass and Fused Quartz Substrates 21
Silicon Carbide and Diamond 22
Gallium Arsenide and Other Group III-V Compound Semiconductors 22
Polymers 23
Shape-Memory Alloys 23
Important Material Properties and Physical Effects 24
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