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Early Work at Texas Instruments      251

              area. Personnel were trained in operation and in calculating the results.
              The simplified interpretation is that the wavelength locations of
              maxima or minima are separated by 2π degrees. Using the wave-
              lengths for adjacent maxima peaks, the general equation becomes

                               δ= 2n d cos θ = (λ  – λ )
                                                   −1 −1
                                               −1
                                    1     1    2   1
                        −1
              Or using cm  to express wavelengths.
                                 2n d cos θ = (ν – ν ) −1
                                   1      1   1  2
              In production areas, charts were made for the operator where all they
              need to do is read the wavelengths of the peaks. To increase accuracy,
              they may count a series of peaks and calculate an average wavelength
              separation.
                 The method has aspects that have to be taken into account to
              increase accuracy. One is the steepness of the gradient change in
              resistivity at the layer-substrate interface. Figure 10.4 illustrates the




                             Substrate               Epitaxial layer


                 .01




                                                           Resistivity
                                                           transition
                                                           region
                ρ (Ω·cm)  0.1  Out diffusion
                                 region
                                                          Up
                                                          diffusion
                                                          region



                 1.0






                             Distance
                                      Mechanical interface
              FIGURE 10.4  Resistivity transition region in epitaxial slices.
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