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Quality Control and Nondestructive Tests  195


            TABLE 5.6 Techniques for Studying Surface Structure and Composition 9

                             Technique       Probe Species     Description
            ESCA      Electron Spectroscopy for  X-rays   Chemical information
                      Chemical Analysis                   through line shape
                                                          analysis. Useful for
                                                          insulators and
                                                          conductors. Widely used
                                                          on polymers. Sample
                                                          may be damaged due to
                                                          X-rays.
            SIMS      Secondary Ion Mass     Ions         Semi-quantitative
                      Spectrometry                        elemental analysis.
                                                          Useful only for
                                                          conductors or Ionic
                                                          insulators. Sample is
                                                          severely damaged.
            AES       Auger Electron Spectroscopy  Electrons  Quantitative elemental
                                                          analysis tool for
                                                          determining surface
                                                          composition of
                                                          semiconductors and
                                                          conductors. Limited to
                                                          non-insulators.
            ATR-FTIR  Attenuated Total       Infrared light  Detailed chemical
                      Reflectance Fourier                  information. Non-vacuum
                      Transform Infrared                  method. Specimens must
                      Spectroscopy                        be flat and capable of
                                                          intimate contact with the
                                                          necessary crystal.
            ISS       Ion Scattering Spectroscopy  Ions   Information gained on
                                                          surface composition.
                                                          Elemental analysis with
                                                          single layer atomic
                                                          resolution.
            XES       X-Ray Emission         X-rays       Information on energy
                      Spectroscopy                        levels and chemical state
                                                          of adsorbed molecules;
                                                          surface composition.


              By itself, SIMS has been shown to be a powerful tool for elemental
                                                                           16
                                                   15
            surface characterization by Benninghoven and Schubert and Tracy .
            However, uncertain or rapidly changing secondary ion yield due to
            changes in chemical bonding make quantitative analysis virtually im-
            possible using SIMS alone. 17,18  SIMS is most helpful when combined
            with other techniques, such as ISS and AES.
              The greatest strength of ESCA (Electron Spectroscopy for Chemical
            Analysis) lies in its ability to provide information on the surface chem-
            istry of polymers or organics. 19  ESCA is also known as x-ray photo-
            electron spectroscopy (XPS). The surface excitation produced by ESCA
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