Page 193 - Inorganic Mass Spectrometry - Fundamentals and Applications

Secondary Ion Mass Spectro~etry 1 79

Surface topography effects on polyc~stalline iron surface after sputtering
with 10 ke'v Kr+ ions at 50" incidence. (From Ref. 76.)

Sputter crater bottoms in (100) Si after 6 key O,+ sputtering to different
depths: (left) 2.1 pm; (center) 2.8 pm; (right) 4.3 pm. (From Ref. 77.)