Page 190 - Inorganic Mass Spectrometry - Fundamentals and Applications
P. 190
Secondary Ion Mass Spectrometry I77
l
I+
0
Periodic relationship observed for sputtering yields. (From Ref. 71 and 74.)
when profiling a field containing more than one grain. With extensive sputtering
on crystalline surfaces, ripples, cones, and other features that can have deleterious
SE
effects on depth resolution are often created. Figure 4.21 shows
of ripples formed in (100) Si after sputtering with 6 keV 02+ depths of 2.1,2.8,
to
and 4.3 pm [77], Tsunoy~a et al. [78] found that the development of surface struc-
ture when sputtering with 02+ was related to the binding energy, B,,, of the
mono~ide for the target atom M. Where B,, was high, for example, Si and
~~
