Page 186 - Inorganic Mass Spectrometry - Fundamentals and Applications

Secondary Ion Mass Spectrometry I 73

N sou

ure 14 Ion optical system of the N~oS~S high-spatial-resolution, high-mass-
50
(From Ref. 61 .)
resolution sc~ning-probe ins~ment.

reviews of inst~mentation by H. Liebl and of optics by G. Slodzian and discus-
sions of quanti~cation and applications. A good introduction to SIMS was written
by J. A. McHugh in Methods of Su~ace Analysis, edited by A. W. Czanderna [64].
R. E. Honig gives a personal view of the development of SIMS in the SIMS V pro-
ceedings [65]. An excellent review, Mass Ana~yzed Secondary Ion Microscopy by
Bernius and Morrison, appeared in re vie^ of Scienti c Inst~~ents in 1987 [66].
A comprehensive test, Secondary Ion Mass Spe~trometry: Basic Concepts, In-
by Benninghoven et al. also appeared
strumental Aspects, A~plications and Trends,
in 1987 1671. In 1989, two additional textbooks on SIMS were published: Sec-
ondary Ion ass Spectrometry: Principles and Applications, edited by Viclceman
et al., which is especially strong in the area of static SIMS [68], and Secondary Ion