Page 5 - Sami Franssila Introduction to Microfabrication

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Library of Congress Cataloging-in-Publication Data

Franssila, Sami.
Introduction to microfabrication / Sami Franssila.
p. cm.
Includes bibliographical references and index.
ISBN 0-470-85105-8 (cloth : alk. paper) – ISBN 0-470-85106-6 (pbk. : alk.
paper)
1. Microelectromechanical systems. 2. Electronic apparatus and
appliances. 3. Microfabrication. I. Title.
TK7875.F73 2004
621.3 – dc22 2004004940

British Library Cataloguing in Publication Data
A catalogue record for this book is available from the British Library

ISBN 0-470-85105-8 (HB)
ISBN 0-470-85106-6 (PB)
Typeset in 9/11pt Times by Laserwords Private Limited, Chennai, India
Printed and bound in Great Britain by Antony Rowe Ltd, Chippenham, Wiltshire
This book is printed on acid-free paper responsibly manufactured from sustainable forestry
in which at least two trees are planted for each one used for paper production.