Page 6 - Sami Franssila Introduction to Microfabrication

Contents

Preface xv

Acknowledgements xix

PART I: INTRODUCTION 1

1 Introduction 3
1.1 Microfabrication disciplines 3
1.2 Substrates 4
1.3 Materials 4
1.4 Surfaces and interfaces 5
1.5 Processes 5
1.6 Lateral dimensions 7
1.7 Vertical dimensions 7
1.8 Devices 8
1.9 MOS transistor 11
1.10 Cleanliness and yield 12
1.11 Industries 12
1.12 Exercises 14
References and related readings 15

2 Micrometrology and Materials Characterization 17
2.1 Microscopy and visualization 17
2.2 Lateral and vertical dimensions 17
2.3 Electrical measurements 19
2.4 Physical and chemical analyses 20
2.5 XRD (X-ray diffraction) 20
2.6 TXRF (total reflection X-ray fluorescence) 21
2.7 SIMS (secondary ion mass spectrometry) 21
2.8 Auger electron spectroscopy (AES) 22
2.9 XPS (X-ray photoelectron spectroscopy)/ESCA 22
2.10 RBS (Rutherford backscattering spectrometry) 22
2.11 EMPA (electron microprobe analysis)/EDX (energy dispersive X-ray analysis) 23
2.12 Other methods 24
2.13 Analysis area and depth 24
2.14 Practical issues with micrometrology 25
2.15 Exercises 26
References and related readings 26