Page 5 - MEMS Mechanical Sensors

Library of Congress Cataloging-in-Publication Data
A catalog record for this book is available from the U.S. Library of Congress.

British Library Cataloguing in Publication Data
Beeby, Stephen.
MEMS mechanical sensors.— (Artech House MEMS library)
1. Microelectricalmechanical systems—Design and construction 2. Transducers
I. Beeby, Stephen
621.3’81

ISBN 1-58053-536-4

Cover design by Igor Valdman

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International Standard Book Number: 1-58053-536-4

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