Page 6 - MEMS Mechanical Sensors

Contents

Preface ix

CHAPTER 1
Introduction 1
1.1 Motivation for the Book 1
1.2 What Are MEMS? 2
1.3 Mechanical Transducers 3
1.4 Why Silicon? 4
1.5 For Whom Is This Book Intended? 5
References 5
CHAPTER 2
Materials and Fabrication Techniques 7
2.1 Introduction 7
2.2 Materials 7
2.2.1 Substrates 7
2.2.2 Additive Materials 11
2.3 Fabrication Techniques 11
2.3.1 Deposition 12
2.3.2 Lithography 17
2.3.3 Etching 21
2.3.4 Surface Micromachining 28
2.3.5 Wafer Bonding 29
2.3.6 Thick-Film Screen Printing 32
2.3.7 Electroplating 33
2.3.8 LIGA 34
2.3.9 Porous Silicon 35
2.3.10 Electrochemical Etch Stop 35
2.3.11 Focused Ion Beam Etching and Deposition 36
References 36

CHAPTER 3
MEMS Simulation and Design Tools 39
3.1 Introduction 39
3.2 Simulation and Design Tools 40
3.2.1 Behavioral Modeling Simulation Tools 40
3.2.2 Finite Element Simulation Tools 43
References 56

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