Page 9 - MEMS Mechanical Sensors
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viii Contents
8.4 Future Inertial Micromachined Sensors 206
References 207
CHAPTER 9
Flow Sensors 213
9.1 Introduction to Microfluidics and Applications for
Micro Flow Sensors 214
9.2 Thermal Flow Sensors 217
9.2.1 Research Devices 219
9.2.2 Commercial Devices 225
9.3 Pressure Difference Flow Sensors 229
9.4 Force Transfer Flow Sensors 232
9.4.1 Drag Force 232
9.4.2 Lift Force 235
9.4.3 Coriolis Force 236
9.4.4 Static Turbine Flow Meter 238
9.5 Nonthermal Time of Flight Flow Sensors 239
9.5.1 Electrohydrodynamic 239
9.5.2 Electrochemical 240
9.6 Flow Sensor Based on the Faraday Principle 241
9.7 Flow Sensor Based on the Periodic Flapping Motion 242
9.8 Flow Imaging 243
9.9 Optical Flow Measurement 245
9.9.1 Fluid Velocity Measurement 245
9.9.2 Particle Detection and Counting 246
9.9.3 Multiphase Flow Detection 246
9.10 Turbulent Flow Studies 247
9.11 Conclusion 248
References 250
About the Authors 257
Index 259
