Page 66 - MEMS Mechanical Sensors

3.2 Simulation and Design Tools 55

T-Spice Pro Reduced order modeling
(ROM)

LVS
MEMS
ANSYS
Solid
Multiphysics
Modeler
L-Edit Pro CIF/GDSII

ANSYS to layout

Foundry
Figure 3.14 MEMS Pro Complete Suite.

VHDL-AMS simulator. The MEMS Master MemsModeler can generate
VHDL-AMS models from ANSYS finite element models. A schematic of the MEMS
Master software components and the links with MEMS Pro and ANSYS are shown
in Figure 3.15.
The MEMS Xplorer suite offers a Unix-based design environment incorporat-
ing an IC design environment (Mentor/Cadence) and ANSYS FE tools. The archi-
tecture is shown in Figure 3.16. It uses some of the same modules described above
but uses Cadence Virtuoso as the layout editor. This contains a MEMS library,
MEMS design tools, and a three-dimensional model generator for integrating with
ANSYS. The fabrication process simulation can be customized in the Foundry Proc-
ess Manager, and this has the very useful capability of being linked to specific Foun-
dry processes that enable precise simulation of the fabrication MEMS components.

VHDL-
AMS
MEMS Modeler
MEMS Master
(ROM)

CIF Analytical
equations

MEMS
ANSYS
Solid
Multiphysics
L-Edit Pro Modeler
CIF/GDSII

Foundry
Figure 3.15 MEMS Master and MEMS Pro tools.